Ultrafine particles produced by plasma enhanced chemical vapor deposition -from SiH4, CH4, NH3 and B2H6 gas mixtures- for nanostructured ceramics aplications

Autors/ores

  • Esther Pascual Miralles
  • Adolf Canillas Biosca
  • Enric Bertran Serra
  • J. Costa
  • G. Viera

Descàrregues

Publicat

2001-03-22

Número

1-1

Secció

Research reviews

Llicència

Creative Commons License

This work, including photographs and other illustrations, unless the contrary is indicated, is subject to an Attributions–Non-Commercial–No Derivative Works 3.0 Creative Commons License, the full text of which can be consulted at http://creativecommons.org/licenses/by-nc-sa/3.0/. You are free to share, copy, distribute and transmit the work provided that the author is credited and reuse of the material is restricted to non-commercial purposes only and that no derivative works are created from the original material.