Micro- and nano-electromechanical systems for [bio]molecular analysis Authors Joan Bausells Roigé Abstract Micro- and nano-mechanical structures fabricated by silicon micromachining technology can be used as transducing elements in [bio]chemical sensors. Cantilever beams with lengths in the tens of micrometers range and widths and thicknesses in the micrometer or submicrometer range are bent by forces in the range of intermolecular forces. The cantilever deflection can be detected by optical or electrical methods and converted to an electrical output. In this work we discuss the sensitivity and resolution of such electromechanical molecular detectors, and present various examples of existing developments and their application to [bio]molecular analysis. Downloads Text complet (Català) PDF Published 2006-01-02 Issue 3-1 : Analytical nanoscience and nanotechnology in Catalonia Section Research reviews License This work is subject, unless the contrary is indicated in the text, the photographs or in other illustrations, to an Attribution —Non-Commercial— No Derivative Works 3.0 Creative Commons License, the full text of which can be consulted at http://creativecommons.org/licenses/by-nc-nd/3.0/. You are free to share, copy, distribute and transmit the work provided that the author is credited and reuse of the material is restricted to non-commercial purposes only and that no derivative works are created from the original material.
