Ultrafine particles produced by plasma enhanced chemical vapor deposition -from SiH4, CH4, NH3 and B2H6 gas mixtures- for nanostructured ceramics aplications Authors Esther Pascual Miralles Adolf Canillas Biosca Enric Bertran Serra J. Costa G. Viera Downloads Text complet Published 2001-03-22 Issue 1-1 Section Research reviews License This work is subject, unless the contrary is indicated in the text, the photographs or in other illustrations, to an Attribution —Non-Commercial— No Derivative Works 3.0 Creative Commons License, the full text of which can be consulted at http://creativecommons.org/licenses/by-nc-nd/3.0/. You are free to share, copy, distribute and transmit the work provided that the author is credited and reuse of the material is restricted to non-commercial purposes only and that no derivative works are created from the original material.
